Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6395150 | Very high aspect ratio gapfill using HDP | Patrick A. Van Cleemput, Mark A. Logan, Bart J. van Schravendijk, William J. King | 2002-05-28 |
| 6335261 | Directional CVD process with optimized etchback | Wesley C. Natzle, Richard A. Conti, Laertis Economikos, Thomas Ivers | 2002-01-01 |