Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6395150 | Very high aspect ratio gapfill using HDP | Patrick A. Van Cleemput, George D. Papasouliotis, Mark A. Logan, Bart J. van Schravendijk | 2002-05-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6395150 | Very high aspect ratio gapfill using HDP | Patrick A. Van Cleemput, George D. Papasouliotis, Mark A. Logan, Bart J. van Schravendijk | 2002-05-28 |