Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6395150 | Very high aspect ratio gapfill using HDP | George D. Papasouliotis, Mark A. Logan, Bart J. van Schravendijk, William J. King | 2002-05-28 |
| 6340628 | Method to deposit SiOCH films with dielectric constant below 3.0 | Ravi Laxman, Jen Shu, Michelle T. Schulberg, Bunsen B. Nie | 2002-01-22 |