Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6340628 | Method to deposit SiOCH films with dielectric constant below 3.0 | Patrick A. Van Cleemput, Ravi Laxman, Jen Shu, Bunsen B. Nie | 2002-01-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6340628 | Method to deposit SiOCH films with dielectric constant below 3.0 | Patrick A. Van Cleemput, Ravi Laxman, Jen Shu, Bunsen B. Nie | 2002-01-22 |