Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383933 | Method of using organic material to enhance STI planarization or other planarization processes | Michael E. Thomas, Prochy Sethna | 2002-05-07 |
| 6348421 | Dielectric gap fill process that effectively reduces capacitance between narrow metal lines using HDP-CVD | Michael E. Thomas | 2002-02-19 |
| 6340628 | Method to deposit SiOCH films with dielectric constant below 3.0 | Patrick A. Van Cleemput, Ravi Laxman, Michelle T. Schulberg, Bunsen B. Nie | 2002-01-22 |