Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6416812 | Method for depositing copper onto a barrier layer | Panayotis Andricacos, Fenton R. McFeely, Milan Paunovic | 2002-07-09 |
| 6383929 | Copper vias in low-k technology | Herbert L. Ho, Mark Hoinkis, Hyun Koo Lee, Yun-Yu Wang, Kwong Hon Wong | 2002-05-07 |