Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6452276 | Ultra thin, single phase, diffusion barrier for metal conductors | Stephan A. Cohen, Cevdet I. Noyan, Kenneth P. Rodbell, John J. Yurkas, Robert Rosenberg | 2002-09-17 |
| 6448131 | Method for increasing the capacitance of a trench capacitor | Cyril Cabral, Jr., Kevin K. Chan, Guy M. Cohen, Ramachandra Divakaruni, Christian Lavoie | 2002-09-10 |
| 6444592 | Interfacial oxidation process for high-k gate dielectric process integration | Arne Ballantine, Douglas A. Buchanan, Eduard A. Cartier, Kevin K. Chan, Matthew W. Copel +6 more | 2002-09-03 |
| 6416812 | Method for depositing copper onto a barrier layer | Panayotis Andricacos, Steven H. Boettcher, Milan Paunovic | 2002-07-09 |
| 6380075 | Method for forming an open-bottom liner for a conductor in an electronic structure and device formed | Cyril Cabral, Jr., Chao-Kun Hu, Sandra G. Malhotra, Stephen M. Rossnagel, Andrew H. Simon | 2002-04-30 |