Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451712 | Method for forming a porous dielectric material layer in a semiconductor device and device formed | Timothy J. Dalton, Stephen E. Greco, Jeffrey Hedrick, Satyanarayana V. Nitta, Sampath Purushothaman +1 more | 2002-09-17 |
| 6452276 | Ultra thin, single phase, diffusion barrier for metal conductors | Stephan A. Cohen, Fenton R. McFeely, Cevdet I. Noyan, Kenneth P. Rodbell, John J. Yurkas | 2002-09-17 |
| 6417572 | Process for producing metal interconnections and product produced thereby | Dureseti Chidambarrao, Ronald G. Filippi, Thomas M. Shaw, Timothy D. Sullivan, Richard A. Wachnik | 2002-07-09 |
| 6342733 | Reduced electromigration and stressed induced migration of Cu wires by surface coating | Chao-Kun Hu, Judith M. Rubino, Carlos J. Sambucetti, Anthony K. Stamper | 2002-01-29 |