Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6452276 | Ultra thin, single phase, diffusion barrier for metal conductors | Fenton R. McFeely, Cevdet I. Noyan, Kenneth P. Rodbell, John J. Yurkas, Robert Rosenberg | 2002-09-17 |
| 6414377 | Low k dielectric materials with inherent copper ion migration barrier | Claudius Feger, Jeffrey Hedrick, Jane M. Shaw | 2002-07-02 |