Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6413854 | Method to build multi level structure | Cyprian Emeka Uzoh, Daniel C. Edelstein, Peter S. Locke | 2002-07-02 |
| 6399490 | Highly conformal titanium nitride deposition process for high aspect ratio structures | Rajarao Jammy, Uwe Schroeder, Kwong Hon Wong | 2002-06-04 |
| 6339022 | Method of annealing copper metallurgy | Arne Ballantine, Edward C. Cooney, III, George A. Dunbar, III, Jeffrey D. Gilbert, Ronald D. Goldblatt +9 more | 2002-01-15 |