Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6387771 | Low temperature oxidation of conductive layers for semiconductor fabrication | Alexander Michaelis | 2002-05-14 |
| 6352893 | Low temperature self-aligned collar formation | Alexander Michaelis, Stephan Kudelka, Jochen Beintner | 2002-03-05 |