Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486024 | Integrated circuit trench device with a dielectric collar stack, and method of forming thereof | Helmut Tews, Stephan Kudelka, Uwe Schroeder, Ulrike Gruening | 2002-11-26 |
| 6429092 | Collar formation by selective oxide deposition | Jochen Beintner, Ulrike Gruening, Oswald Spindler, Zvonimir Gabric | 2002-08-06 |
| 6426253 | Method of forming a vertically oriented device in an integrated circuit | Helmut Tews, Brian Lee, Uwe Schroeder, Stephan Kudelka | 2002-07-30 |
| 6426254 | Method for expanding trenches by an anisotropic wet etch | Stephen Kudelka, Dirk Tobben | 2002-07-30 |
| 6387771 | Low temperature oxidation of conductive layers for semiconductor fabrication | Oliver Genz | 2002-05-14 |
| 6352893 | Low temperature self-aligned collar formation | Stephan Kudelka, Jochen Beintner, Oliver Genz | 2002-03-05 |
| 6335247 | Integrated circuit vertical trench device and method of forming thereof | Helmut Tews, Stephan Kudelka, Uwe Schroeder, Brian Lee | 2002-01-01 |