Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6429092 | Collar formation by selective oxide deposition | Jochen Beintner, Alexander Michaelis, Ulrike Gruening, Zvonimir Gabric | 2002-08-06 |
| 6380074 | Deposition of various base layers for selective layer growth in semiconductor production | Markus Kirchhoff, Hans-Peter Sperlich, Uwe Schilling, Zvonimir Gabric, Stephan Wege +1 more | 2002-04-30 |