Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6380074 | Deposition of various base layers for selective layer growth in semiconductor production | Markus Kirchhoff, Uwe Schilling, Zvonimir Gabric, Oswald Spindler, Stephan Wege +1 more | 2002-04-30 |