Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479373 | Method of structuring layers with a polysilicon layer and an overlying metal or metal silicide layer using a three step etching process with fluorine, chlorine, bromine containing gases | Joerg Dreybrodt, Dirk Drescher, Ralf Zedlitz | 2002-11-12 |
| 6436731 | Method of producing a semiconductor device comprising a cleaning process for removing silicon-containing material | Achim Neu, Volker Strutz, Rudiger Uhlmann | 2002-08-20 |
| 6380074 | Deposition of various base layers for selective layer growth in semiconductor production | Markus Kirchhoff, Hans-Peter Sperlich, Uwe Schilling, Zvonimir Gabric, Oswald Spindler +1 more | 2002-04-30 |
| 6380076 | Dielectric filling of electrical wiring planes | Markus Kirchhoff, Michael Rogalli | 2002-04-30 |