Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6437401 | Structure and method for improved isolation in trench storage cells | Jack A. Mandelman, Stephan Kudelka, Andreas Knorr, Stephen Rahn, Helmut Tews | 2002-08-20 |
| 6420216 | Fuse processing using dielectric planarization pillars | Larry Clevenger, Louis L. Hsu, Chandrasekhar Narayan, Jeremy K. Stephens | 2002-07-16 |
| 6379222 | Methods and apparatus for chemical mechanical planarization (CMP) of a semiconductor wafer | Jeremy K. Stephens, Suri Hedge | 2002-04-30 |
| 6348395 | Diamond as a polish-stop layer for chemical-mechanical planarization in a damascene process flow | Lawrence A. Clevenger, Louis L. Hsu, Jeremy K. Stephens | 2002-02-19 |