Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451662 | Method of forming low-leakage on-chip capacitor | Michael P. Chudzik, Oleg Gluschenkov, Uwe Schroeder, Helmut Tews | 2002-09-17 |
| 6362040 | Reduction of orientation dependent oxidation for vertical sidewalls of semiconductor substrates | Helmut Tews, Brian Lee, Ulrike Gruening, John Faltermeier | 2002-03-26 |