Issued Patents 2002
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458691 | Dual inlaid process using an imaging layer to protect via from poisoning | Ramkumar Subramanian, Marina V. Plat, Bhanwar Singh | 2002-10-01 |
| 6448164 | Dark field image reversal for gate or line patterning | Ramkumar Subramanian, Marina V. Plat, Todd P. Lukanc | 2002-09-10 |
| 6440640 | Thin resist with transition metal hard mask for via etch application | Chih-Yuh Yang, Harry J. Levinson, Khanh B. Nguyen, Fei Wang, Scott A. Bell | 2002-08-27 |
| 6423650 | Ultra-thin resist coating quality by increasing surface roughness of the substrate | Marina V. Plat, Michael K. Templeton, Bhanwar Singh | 2002-07-23 |
| 6423475 | Sidewall formation for sidewall patterning of sub 100 nm structures | Michael K. Templeton, Kathleen R. Early | 2002-07-23 |
| 6417084 | T-gate formation using a modified conventional poly process | Bhanwar Singh, Marina V. Plat, Ramkumar Subramanian | 2002-07-09 |
| 6403456 | T or T/Y gate formation using trim etch processing | Marina V. Plat, Bhanwar Singh, Ramkumar Subramanian | 2002-06-11 |
| 6399284 | Sub-lithographic contacts and vias through pattern, CVD and etch back processing | — | 2002-06-04 |
| 6391525 | Sidewall patterning for sub 100 nm gate conductors | — | 2002-05-21 |
| 6383952 | RELACS process to double the frequency or pitch of small feature formation | Ramkumar Subramanian, Bhanwar Singh, Marina V. Plat, Scott A. Bell | 2002-05-07 |
| 6380588 | Semiconductor device having uniform spacers | William G. En, Minh Van Ngo, Chih-Yuk Yang, David K. Foote, Scott A. Bell +1 more | 2002-04-30 |
| 6380067 | Method for creating partially UV transparent anti-reflective coating for semiconductors | Ramkumar Subramanian, Minh Van Ngo, Suzette K. Pangrle, Kashmir Sahota | 2002-04-30 |
| 6380047 | Shallow trench isolation formation with two source/drain masks and simplified planarization mask | Basab Bandyopadhyay, Nick Kepler, Olov Karlsson, Larry Wang, Effiong Ibok | 2002-04-30 |
| 6358856 | Bright field image reversal for contact hole patterning | Ramkumar Subramanian, Marina V. Plat, Todd P. Lukanc | 2002-03-19 |
| 6350559 | Method for creating thinner resist coating that also has fewer pinholes | Michael K. Templeton, Kathleen R. Early | 2002-02-26 |