Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6455888 | Memory cell structure for elimination of oxynitride (ONO) etch residue and polysilicon stringers | Michael K. Templeton, Nicholas H. Tripsas, Maria C. Chan | 2002-09-24 |
| 6423475 | Sidewall formation for sidewall patterning of sub 100 nm structures | Christopher F. Lyons, Michael K. Templeton | 2002-07-23 |
| 6352930 | Bilayer anti-reflective coating and etch hard mask | Suzette K. Pangrle, Maria C. Chan, Lewis Shen | 2002-03-05 |
| 6350559 | Method for creating thinner resist coating that also has fewer pinholes | Michael K. Templeton, Christopher F. Lyons | 2002-02-26 |