Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6452225 | Method and structure of etching a memory cell polysilicon gate layer using resist mask and etched silicon oxynitride | Wenge Yang | 2002-09-17 |
| 6383939 | Method for etching memory gate stack using thin resist layer | Wenge Yang | 2002-05-07 |
| 6372651 | Method for trimming a photoresist pattern line for memory gate etching | Wenge Yang | 2002-04-16 |
| 6365509 | Semiconductor manufacturing method using a dielectric photomask | Ramkumar Subramanian, Wenge Yang, Marina V. Plat | 2002-04-02 |
| 6355546 | Thermally grown protective oxide buffer layer for ARC removal | Richard J. Huang | 2002-03-12 |
| 6352930 | Bilayer anti-reflective coating and etch hard mask | Kathleen R. Early, Suzette K. Pangrle, Maria C. Chan | 2002-03-05 |