Issued Patents 2002
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482699 | Method for forming self-aligned contacts and local interconnects using decoupled local interconnect process | YongZhong Hu, Fei Wang, Yu Sun, Ramkumar Subramanian | 2002-11-19 |
| 6452225 | Method and structure of etching a memory cell polysilicon gate layer using resist mask and etched silicon oxynitride | Lewis Shen | 2002-09-17 |
| 6423612 | Method of fabricating a shallow trench isolation structure with reduced topography | John Jianshi Wang, Fei Wang | 2002-07-23 |
| 6420240 | Method for reducing the step height of shallow trench isolation structures | John Jianshi Wang, Hao Fang | 2002-07-16 |
| 6416933 | Method to produce small space pattern using plasma polymerization layer | Bhanwar Singh, Bharath Rangarajan | 2002-07-09 |
| 6383939 | Method for etching memory gate stack using thin resist layer | Lewis Shen | 2002-05-07 |
| 6376389 | Method for eliminating anti-reflective coating in semiconductors | Ramkumar Subramanian, Minh Van Ngo, Kashmir Sahota, YongZhong Hu, Hiroyuki Kinoshita +1 more | 2002-04-23 |
| 6372651 | Method for trimming a photoresist pattern line for memory gate etching | Lewis Shen | 2002-04-16 |
| 6365509 | Semiconductor manufacturing method using a dielectric photomask | Ramkumar Subramanian, Marina V. Plat, Lewis Shen | 2002-04-02 |
| 6359307 | Method for forming self-aligned contacts and interconnection lines using dual damascene techniques | Fei Wang, Hiroyuki Kinoshita, Kashmir Sahota, Yu Sun | 2002-03-19 |
| 6348406 | Method for using a low dielectric constant layer as a semiconductor anti-reflective coating | Ramkumar Subramanian, Minh Van Ngo, Kashmir Sahota, YongZhong Hu, Hiroyuki Kinoshita +1 more | 2002-02-19 |