Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6426297 | Differential pressure chemical-mechanical polishing in integrated circuit interconnects | Krishnashree Achuthan, Sergey Lopatin | 2002-07-30 |
| 6413869 | Dielectric protected chemical-mechanical polishing in integrated circuit interconnects | Krishnashree Achuthan, Steven C. Avanzino | 2002-07-02 |
| 6410443 | Method for removing semiconductor ARC using ARC CMP buffing | Steven C. Avanzino, Stephen Keetai Park, David Matsumoto, Mark T. Ramsbey | 2002-06-25 |
| 6380067 | Method for creating partially UV transparent anti-reflective coating for semiconductors | Ramkumar Subramanian, Minh Van Ngo, Suzette K. Pangrle, Christopher F. Lyons | 2002-04-30 |
| 6376389 | Method for eliminating anti-reflective coating in semiconductors | Ramkumar Subramanian, Minh Van Ngo, YongZhong Hu, Hiroyuki Kinoshita, Fei Wang +1 more | 2002-04-23 |
| 6359307 | Method for forming self-aligned contacts and interconnection lines using dual damascene techniques | Fei Wang, Hiroyuki Kinoshita, Yu Sun, Wenge Yang | 2002-03-19 |
| 6348406 | Method for using a low dielectric constant layer as a semiconductor anti-reflective coating | Ramkumar Subramanian, Minh Van Ngo, YongZhong Hu, Hiroyuki Kinoshita, Fei Wang +1 more | 2002-02-19 |