Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482699 | Method for forming self-aligned contacts and local interconnects using decoupled local interconnect process | Fei Wang, Wenge Yang, Yu Sun, Ramkumar Subramanian | 2002-11-19 |
| 6376389 | Method for eliminating anti-reflective coating in semiconductors | Ramkumar Subramanian, Minh Van Ngo, Kashmir Sahota, Hiroyuki Kinoshita, Fei Wang +1 more | 2002-04-23 |
| 6348406 | Method for using a low dielectric constant layer as a semiconductor anti-reflective coating | Ramkumar Subramanian, Minh Van Ngo, Kashmir Sahota, Hiroyuki Kinoshita, Fei Wang +1 more | 2002-02-19 |