Issued Patents 2002
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475929 | Method of manufacturing a semiconductor structure with treatment to sacrificial stop layer producing diffusion to an adjacent low-k dielectric layer lowering the constant | Calvin T. Gabriel, Lynne A. Okada, Fei Wang | 2002-11-05 |
| 6472336 | Forming an encapsulating layer after deposition of a dielectric comprised of corrosive material | Minh Van Ngo, Richard J. Huang | 2002-10-29 |
| 6468894 | Metal interconnection structure with dummy vias | Kai Yang | 2002-10-22 |
| 6462417 | Coherent alloy diffusion barrier for integrated circuit interconnects | Pin-Chin Connie Wang, Amit P. Marathe, Minh Van Ngo | 2002-10-08 |
| 6383950 | Insulating and capping structure with preservation of the low dielectric constant of the insulating layer | Minh Van Ngo, Susan Tovar | 2002-05-07 |
| 6380067 | Method for creating partially UV transparent anti-reflective coating for semiconductors | Ramkumar Subramanian, Minh Van Ngo, Kashmir Sahota, Christopher F. Lyons | 2002-04-30 |
| 6361837 | Method and system for modifying and densifying a porous film | Richard J. Huang, Shekhar Pramanick | 2002-03-26 |
| 6352930 | Bilayer anti-reflective coating and etch hard mask | Kathleen R. Early, Maria C. Chan, Lewis Shen | 2002-03-05 |