Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495435 | Method for improved control of lines adjacent to a select gate using a mask assist feature | Michael K. Templeton, Hao Fang | 2002-12-17 |
| 6455888 | Memory cell structure for elimination of oxynitride (ONO) etch residue and polysilicon stringers | Kathleen R. Early, Michael K. Templeton, Nicholas H. Tripsas | 2002-09-24 |
| 6448594 | Method and system for processing a semiconductor device | Hao Fang, Lu You, Mark S. Chang, King Wai Kelwin Ko | 2002-09-10 |
| 6352930 | Bilayer anti-reflective coating and etch hard mask | Kathleen R. Early, Suzette K. Pangrle, Lewis Shen | 2002-03-05 |