Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489253 | Method of forming a void-free interlayer dielectric (ILD0) for 0.18-&mgr;m flash memory technology and semiconductor device thereby formed | Minh Van Ngo, Robert A. Huertas, Lu You, Pei-Yuan Gao | 2002-12-03 |
| 6472327 | Method and system for etching tunnel oxide to reduce undercutting during memory array fabrication | Mark S. Chang, Hao Fang | 2002-10-29 |
| 6448594 | Method and system for processing a semiconductor device | Maria C. Chan, Hao Fang, Lu You, Mark S. Chang | 2002-09-10 |
| 6445051 | Method and system for providing contacts with greater tolerance for misalignment in a flash memory | Mark S. Chang, Hao Fang, John Jianshi Wang, Michael K. Templeton, Lu You +1 more | 2002-09-03 |