Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489253 | Method of forming a void-free interlayer dielectric (ILD0) for 0.18-&mgr;m flash memory technology and semiconductor device thereby formed | Minh Van Ngo, Robert A. Huertas, Lu You, King Wai Kelwin Ko | 2002-12-03 |
| 6410461 | Method of depositing sion with reduced defects | Minh Van Ngo | 2002-06-25 |
| 6403385 | Method of inspecting a semiconductor wafer for defects | Subramanian Venkatkrishnan, Tho Le La, Richard Lamm | 2002-06-11 |
| 6369453 | Semiconductor wafer for measurement and recordation of impurities in semiconductor insulators | Narendra Patel, Allen S. Yu | 2002-04-09 |