Issued Patents 2002
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468815 | Overlay radius offset shift engine | Paul J. Steffan | 2002-10-22 |
| 6463171 | Automatic defect resizing tool | Paul J. Steffan | 2002-10-08 |
| 6448606 | Semiconductor with increased gate coupling coefficient | Thomas C. Scholer, Paul J. Steffan | 2002-09-10 |
| 6433371 | Controlled gate length and gate profile semiconductor device | Thomas C. Scholer, Paul J. Steffan | 2002-08-13 |
| 6430572 | Recipe management database system | Paul J. Steffan | 2002-08-06 |
| 6426301 | Reduction of via etch charging damage through the use of a conducting hard mask | Jeffrey A. Shields, Ramkumar Subramanian, Bharath Rangarajan | 2002-07-30 |
| 6424881 | Computer generated recipe selector utilizing defect file information | Paul J. Steffan | 2002-07-23 |
| 6423557 | ADC based in-situ destructive analysis selection and methodology therefor | Paul J. Steffan | 2002-07-23 |
| 6421574 | Automatic defect classification system based variable sampling plan | Paul J. Steffan | 2002-07-16 |
| 6395567 | Process control using ideal die data in an optical comparator scanning system | Paul J. Steffan | 2002-05-28 |
| 6387758 | Method of making vertical field effect transistor having channel length determined by the thickness of a layer of dummy material | Chau M. Ho | 2002-05-14 |
| 6377898 | Automatic defect classification comparator die selection system | Paul J. Steffan | 2002-04-23 |
| 6376877 | Double self-aligning shallow trench isolation semiconductor and manufacturing method therefor | Jeffrey A. Shields | 2002-04-23 |
| 6376312 | Formation of non-volatile memory device comprised of an array of vertical field effect transistor structures | — | 2002-04-23 |
| 6369453 | Semiconductor wafer for measurement and recordation of impurities in semiconductor insulators | Pei-Yuan Gao, Narendra Patel | 2002-04-09 |
| 6350639 | Simplified graded LDD transistor using controlled polysilicon gate profile | Patrick K. Cheung, Paul J. Steffan | 2002-02-26 |
| 6338001 | In line yield prediction using ADC determined kill ratios die health statistics and die stacking | Paul J. Steffan | 2002-01-08 |