Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6403385 | Method of inspecting a semiconductor wafer for defects | Subramanian Venkatkrishnan, Pei-Yuan Gao, Richard Lamm | 2002-06-11 |
| 6350627 | Interlevel dielectric thickness monitor for complex semiconductor chips | John Jianshi Wang, Hao Fang | 2002-02-26 |