Issued Patents 2002
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458691 | Dual inlaid process using an imaging layer to protect via from poisoning | Ramkumar Subramanian, Christopher F. Lyons, Bhanwar Singh | 2002-10-01 |
| 6458606 | Etch bias distribution across semiconductor wafer | Luigi Capodieci, Scott A. Bell, Todd P. Lukanc | 2002-10-01 |
| 6448164 | Dark field image reversal for gate or line patterning | Christopher F. Lyons, Ramkumar Subramanian, Todd P. Lukanc | 2002-09-10 |
| 6423650 | Ultra-thin resist coating quality by increasing surface roughness of the substrate | Christopher F. Lyons, Michael K. Templeton, Bhanwar Singh | 2002-07-23 |
| 6420280 | Method and system for reducing ARC layer removal by providing a capping layer for the ARC layer | — | 2002-07-16 |
| 6417084 | T-gate formation using a modified conventional poly process | Bhanwar Singh, Ramkumar Subramanian, Christopher F. Lyons | 2002-07-09 |
| 6403456 | T or T/Y gate formation using trim etch processing | Christopher F. Lyons, Bhanwar Singh, Ramkumar Subramanian | 2002-06-11 |
| 6383952 | RELACS process to double the frequency or pitch of small feature formation | Ramkumar Subramanian, Bhanwar Singh, Christopher F. Lyons, Scott A. Bell | 2002-05-07 |
| 6365509 | Semiconductor manufacturing method using a dielectric photomask | Ramkumar Subramanian, Wenge Yang, Lewis Shen | 2002-04-02 |
| 6358856 | Bright field image reversal for contact hole patterning | Christopher F. Lyons, Ramkumar Subramanian, Todd P. Lukanc | 2002-03-19 |