Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492066 | Characterization and synthesis of OPC structures by fourier space analysis and/or wavelet transform expansion | Christopher A. Spence | 2002-12-10 |
| 6458606 | Etch bias distribution across semiconductor wafer | Marina V. Plat, Scott A. Bell, Todd P. Lukanc | 2002-10-01 |