Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492066 | Characterization and synthesis of OPC structures by fourier space analysis and/or wavelet transform expansion | Luigi Capodieci | 2002-12-10 |
| 6356340 | Piezo programmable reticle for EUV lithography | — | 2002-03-12 |