Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383906 | Method of forming junction-leakage free metal salicide in a semiconductor wafer with ultra-low silicon consumption | Karsten Wieczorek, Nicholas J. Kepler, Paul R. Besser | 2002-05-07 |
| 6380040 | Prevention of dopant out-diffusion during silicidation and junction formation | Nick Kepler, Karsten Wieczorek, Paul R. Besser | 2002-04-30 |
| 6380047 | Shallow trench isolation formation with two source/drain masks and simplified planarization mask | Basab Bandyopadhyay, Nick Kepler, Olov Karlsson, Effiong Ibok, Christopher F. Lyons | 2002-04-30 |