Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500755 | Resist trim process to define small openings in dielectric layers | Srikanteswara Dakshina-Murthy, Paul R. Besser, Jonathan B. Smith, Eric M. Apelgren, Christian Zistl +2 more | 2002-12-31 |
| 6406993 | Method of defining small openings in dielectric layers | Srikanteswara Dakshina-Murthy, Paul R. Besser, Jonathan B. Smith, Eric M. Apelgren, Christian Zistl +2 more | 2002-06-18 |
| 6383906 | Method of forming junction-leakage free metal salicide in a semiconductor wafer with ultra-low silicon consumption | Karsten Wieczorek, Paul R. Besser, Larry Wang | 2002-05-07 |