Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500755 | Resist trim process to define small openings in dielectric layers | Paul R. Besser, Jonathan B. Smith, Eric M. Apelgren, Christian Zistl, Jeremy I. Martin +2 more | 2002-12-31 |
| 6444513 | Metal gate stack with etch stop layer having implanted metal species | Paul R. Besser | 2002-09-03 |
| 6406950 | Definition of small damascene metal gates using reverse through approach | — | 2002-06-18 |
| 6406993 | Method of defining small openings in dielectric layers | Paul R. Besser, Jonathan B. Smith, Eric M. Apelgren, Christian Zistl, Jeremy I. Martin +2 more | 2002-06-18 |