Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500755 | Resist trim process to define small openings in dielectric layers | Srikanteswara Dakshina-Murthy, Paul R. Besser, Jonathan B. Smith, Eric M. Apelgren, Christian Zistl +2 more | 2002-12-31 |
| 6498112 | Graded oxide caps on low dielectric constant (low K) chemical vapor deposition (CVD) films | Ting Tsui | 2002-12-24 |
| 6436808 | NH3/N2-plasma treatment to prevent organic ILD degradation | Minh Van Ngo, Dawn Hopper | 2002-08-20 |
| 6420193 | Repair of film having an SI-O backbone | — | 2002-07-16 |
| 6406993 | Method of defining small openings in dielectric layers | Srikanteswara Dakshina-Murthy, Paul R. Besser, Jonathan B. Smith, Eric M. Apelgren, Christian Zistl +2 more | 2002-06-18 |