Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498112 | Graded oxide caps on low dielectric constant (low K) chemical vapor deposition (CVD) films | Jeremy I. Martin | 2002-12-24 |
| 6489238 | Method to reduce photoresist contamination from silicon carbide films | — | 2002-12-03 |
| 6407558 | Method of determining the doping concentration across a surface of a semiconductor material | Sunil N. Shabde, Yowjuang W. Liu | 2002-06-18 |
| 6339958 | Adhesion strength testing using a depth-sensing indentation technique | Young-Chang Joo | 2002-01-22 |