Issued Patents 2002
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486029 | Integration of an ion implant hard mask structure into a process for fabricating high density memory cells | Bharath Rangarajan, Stephan K. Park, Fei Wang, Dawn Hopper, Jack F. Thomas +2 more | 2002-11-26 |
| 6458677 | Process for fabricating an ONO structure | Dawn Hopper, Bharath Rangarajan | 2002-10-01 |
| 6436766 | Process for fabricating high density memory cells using a polysilicon hard mask | Bharath Rangarajan, Fei Wang, Dawn Hopper, Stephen Keetai Park, Jack F. Thomas +2 more | 2002-08-20 |
| 6410388 | Process for optimizing pocket implant profile by RTA implant annealing for a non-volatile semiconductor device | George Jonathan Kluth, Stephen Keetai Park, Arvind Halliyal | 2002-06-25 |
| 6406960 | Process for fabricating an ONO structure having a silicon-rich silicon nitride layer | Dawn Hopper, Bharath Rangarajan, Arvind Halliyal | 2002-06-18 |
| 6399480 | Methods and arrangements for insulating local interconnects for improved alignment tolerance and size reduction | William G. En, Darin A. Chan, Fei Wang, Minh Van Ngo | 2002-06-04 |
| 6399446 | Process for fabricating high density memory cells using a metallic hard mask | Bharath Rangarajan, Fei Wang, Dawn Hopper, Stephen Keetai Park, Jack F. Thomas +2 more | 2002-06-04 |
| 6395644 | Process for fabricating a semiconductor device using a silicon-rich silicon nitride ARC | Dawn Hopper, Minh Van Ngo | 2002-05-28 |
| 6380588 | Semiconductor device having uniform spacers | William G. En, Minh Van Ngo, Chih-Yuk Yang, Scott A. Bell, Olov Karlsson +1 more | 2002-04-30 |
| 6376308 | Process for fabricating an EEPROM device having a pocket substrate region | Fei Wang, Bharath Rangarajan, George J. Kluth | 2002-04-23 |
| 6365320 | Process for forming anti-reflective film for semiconductor fabrication using extremely short wavelength deep ultraviolet photolithography | Subhash Gupta | 2002-04-02 |