Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440640 | Thin resist with transition metal hard mask for via etch application | Chih-Yuh Yang, Christopher F. Lyons, Khanh B. Nguyen, Fei Wang, Scott A. Bell | 2002-08-27 |
| 6399401 | Test structures for electrical linewidth measurement and processes for their formation | Jongwook Kye | 2002-06-04 |