Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489068 | Process for observing overlay errors on lithographic masks | — | 2002-12-03 |
| 6459480 | Measurement method of Zernike coma aberration coefficient | — | 2002-10-01 |
| 6399401 | Test structures for electrical linewidth measurement and processes for their formation | Harry J. Levinson | 2002-06-04 |