Issued Patents All Time
Showing 26–43 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8367299 | Resist composition, method of forming resist pattern, compound and acid generator | Yoshiyuki Utsumi, Takehiro Seshimo, Tsuyoshi Nakamura, Naoto Motoike, Hiroaki Shimizu +2 more | 2013-02-05 |
| 8367297 | Resist composition, method of forming resist pattern, novel compound and acid generator | Yoshiyuki Utsumi, Shinichi Hidesaka, Natsuko Maruyama | 2013-02-05 |
| 8338076 | Resist composition, method of forming resist pattern, novel compound, and acid generator | Yoshiyuki Utsumi, Hideo Hada, Takehiro Seshimo, Kensuke Matsuzawa, Keita Ishiduka +1 more | 2012-12-25 |
| 8252505 | Compound and method of producing same, acid generator, resist composition, and method of forming resist pattern | Keita Ishiduka, Kensuke Matsuzawa, Yoshiyuki Utsumi, Hiroaki Shimizu | 2012-08-28 |
| 8247160 | Resist composition, method of forming resist pattern, and novel compound and acid generator | Yoshiyuki Utsumi, Keita Ishiduka, Kensuke Matsuzawa, Hiroaki Shimizu, Tsuyoshi Nakamura | 2012-08-21 |
| 8227169 | Compound, acid generator, resist composition, and method of forming resist pattern | Yoshiyuki Utsumi, Takehito Seo, Hideo Hada, Kotaro Endo, Daisuke Kawana +2 more | 2012-07-24 |
| 8211616 | Positive resist composition and method of forming resist pattern | Hiroaki Shimizu, Tsuyoshi Nakamura, Yoshiyuki Utsumi, Keita Ishiduka, Kensuke Matsuzawa | 2012-07-03 |
| 8206891 | Positive resist composition and method of forming resist pattern | Takehiro Seshimo, Yoshiyuki Utsumi, Takahiro Dazai, Tomoyuki Hirano, Fumitake Kaneko +1 more | 2012-06-26 |
| 8206890 | Resist composition, method of forming resist pattern, compound and acid generator | Yoshiyuki Utsumi, Takehiro Seshimo, Tsuyoshi Nakamura, Naoto Motoike, Hiroaki Shimizu +2 more | 2012-06-26 |
| 8124313 | Resist composition, method of forming resist pattern, novel compound, and acid generator | Takehiro Seshimo, Yoshiyuki Utsumi, Hideo Hada, Hiroaki Shimizu, Tsuyoshi Nakamura | 2012-02-28 |
| 7955777 | Compound, acid generator, resist composition and method of forming resist pattern | Takehiro Seshimo, Yoshiyuki Utsumi, Yoshitaka Komuro, Keita Ishiduka, Kyoko Ohshita | 2011-06-07 |
| 7927780 | Resist composition, method of forming resist pattern, novel compound and method of producing the same, and acid generator | Takeshi Iwai, Hideo Hada, Shinichi Hidesaka, Tsuyoshi Kurosawa, Natsuko Maruyama +4 more | 2011-04-19 |
| 7914968 | Positive resist composition and method of forming resist pattern | Takeyoshi Mimura, Ryoichi Takasu | 2011-03-29 |
| 7776510 | Resist composition, method of forming resist pattern, compound and acid generator | Takeshi Iwai, Hideo Hada, Keita Ishiduka, Hiroaki Shimizu, Kyoko Ohshita +4 more | 2010-08-17 |
| 7745097 | Compound, manufacturing method thereof, acid generator, resist composition and method of forming resist pattern | Hideo Hada, Takeshi Iwai, Takehiro Seshimo, Keita Ishiduka | 2010-06-29 |
| 7713679 | Resist composition, method of forming resist pattern, novel compound, and acid generator | Keita Ishiduka, Yoshiyuki Utsumi, Takehiro Seshimo, Hideo Hada | 2010-05-11 |
| 7682772 | Resist composition, method of forming resist pattern, novel compound, and acid generator | Takehiro Seshimo, Yoshiyuki Utsumi, Hideo Hada, Hiroaki Shimizu, Tsuyoshi Nakamura | 2010-03-23 |
| 7488568 | Resist composition, method of forming resist pattern, compound and acid generator | Takeshi Iwai, Hideo Hada, Masaru Takeshita, Keita Ishiduka, Hiroaki Shimizu +6 more | 2009-02-10 |