Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8367297 | Resist composition, method of forming resist pattern, novel compound and acid generator | Akiya Kawaue, Yoshiyuki Utsumi, Shinichi Hidesaka | 2013-02-05 |
| 7927780 | Resist composition, method of forming resist pattern, novel compound and method of producing the same, and acid generator | Akiya Kawaue, Takeshi Iwai, Hideo Hada, Shinichi Hidesaka, Tsuyoshi Kurosawa +4 more | 2011-04-19 |