Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7474420 | In-die optical metrology | Shifang Li, Junwei Bao | 2009-01-06 |
| 7467064 | Transforming metrology data from a semiconductor treatment system using multivariate analysis | Junwei Bao, Yan Chen, Weichert Heiko, Sebastien Egret | 2008-12-16 |
| 7428044 | Drift compensation for an optical metrology tool | Yan Chen, Holger Tuitje | 2008-09-23 |
| 7417750 | Consecutive measurement of structures formed on a semiconductor wafer using an angle-resolved spectroscopic scatterometer | Junwei Bao, Manuel Madriaga | 2008-08-26 |
| 7394554 | Selecting a hypothetical profile to use in optical metrology | Junwei Bao, Srinivas Doddi, Emmanuel Drege, Jin Wen, Sanjay K. Yedur +3 more | 2008-07-01 |
| 7388677 | Optical metrology optimization for repetitive structures | Junwei Bao, Joerg Bischoff | 2008-06-17 |
| 7330279 | Model and parameter selection for optical metrology | Emmanuel Drege, Junwei Bao, Srinivas Doddi, Xinhui Niu, Nickhil Jakatdar | 2008-02-12 |
| 7327475 | Measuring a process parameter of a semiconductor fabrication process using optical metrology | Hanyou Chu, Yan Chen | 2008-02-05 |
| 7216045 | Selection of wavelengths for integrated circuit optical metrology | Srinivas Doddi, Lawrence Lane, Mike Laughery, Junwei Bao, Kelly Barry +2 more | 2007-05-08 |
| 7171284 | Optical metrology model optimization based on goals | Emmanuel Drege, Shifang Ll, Junwei Bao | 2007-01-30 |
| 7126700 | Parametric optimization of optical metrology model | Junwei Bao, Manuel Madriaga, Daniel Prager | 2006-10-24 |
| 7092110 | Optimized model and parameter selection for optical metrology | Raghu Balasubramanian, Sanjay K. Yedur, Nickhil Jakatdar | 2006-08-15 |
| 6853942 | Metrology hardware adaptation with universal library | Emmanuel Drege, Junwei Bao, Srinivas Doddi | 2005-02-08 |
| 6842261 | Integrated circuit profile value determination | Junwei Bao, Wen Jin, Emmanuel Drege, Srinivas Doddi | 2005-01-11 |
| 6609086 | Profile refinement for integrated circuit metrology | Junwei Bao, Srinivas Doddi, Nickhil Jakatdar | 2003-08-19 |