Issued Patents All Time
Showing 126–150 of 199 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9921478 | Negative tone developer compatible photoresist composition and methods of use | — | 2018-03-20 |
| 9842965 | Textured devices | Erik Byers, Scott E. Sills | 2017-12-12 |
| 9837314 | Self-alignment of metal and via using selective deposition | Jeffrey Smith | 2017-12-05 |
| 9824894 | Method for correcting wafer bow from overlay | — | 2017-11-21 |
| 9818611 | Methods of forming etch masks for sub-resolution substrate patterning | — | 2017-11-14 |
| 9760008 | Direct current superposition freeze | — | 2017-09-12 |
| 9741580 | Substrate mask patterns, methods of forming a structure on a substrate, methods of forming a square lattice pattern from an oblique lattice pattern, and methods of forming a pattern on a substrate | Vishal Sipani, William R. Brown, Shane J. Trapp, Ranjan Khurana, Kevin R. Shea | 2017-08-22 |
| 9735067 | Substrate tuning system and method using optical projection | Daniel Fulford, Gerrit J. Leusink | 2017-08-15 |
| 9721793 | Method of patterning without dummy gates | Jeffrey Smith | 2017-08-01 |
| 9718082 | Inline dispense capacitor | Ronald Nasman, James Grootegoed, Norman A. Jacobson, Jr. | 2017-08-01 |
| 9711419 | Substrate backside texturing | Carlos A. Fonseca, Benjamen M. Rathsack, Jeffrey Smith, Lior Huli, Teruhiko Kodama +1 more | 2017-07-18 |
| 9673050 | Method of patterning incorporating overlay error protection | Jeffrey Smith | 2017-06-06 |
| 9666531 | Semiconductor device structures | Adam L. Olson, Kaveri Jain, Lijing Gou, William R. Brown, Ho Seop Eom +1 more | 2017-05-30 |
| 9653315 | Methods of fabricating substrates | Scott E. Sills, Gurtej S. Sandhu | 2017-05-16 |
| 9653319 | Method for using post-processing methods for accelerating EUV lithography | Kaushik A. Kumar | 2017-05-16 |
| 9646898 | Methods for treating a substrate by optical projection of a correction pattern based on a detected spatial heat signature of the substrate | Daniel Fulford, Gerrit J. Leusink | 2017-05-09 |
| 9645391 | Substrate tuning system and method using optical projection | — | 2017-05-09 |
| 9645495 | Critical dimension control in photo-sensitized chemically-amplified resist | — | 2017-05-09 |
| 9646845 | Method of forming a mask for substrate patterning | — | 2017-05-09 |
| 9620383 | Method for uncovering underlying alignment patterns | — | 2017-04-11 |
| 9595441 | Patterning a substrate using grafting polymer material | Jeffrey Smith | 2017-03-14 |
| 9583381 | Methods for forming semiconductor devices and semiconductor device structures | Ranjan Khurana, Michael Hyatt, Scott L. Light, Kevin J. Torek | 2017-02-28 |
| 9466527 | Method for creating contacts in semiconductor substrates | — | 2016-10-11 |
| 9437447 | Method for patterning a substrate for planarization | — | 2016-09-06 |
| 9406526 | Method for patterning contact openings on a substrate | — | 2016-08-02 |