Issued Patents All Time
Showing 176–199 of 199 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8748321 | Method for epitaxial devices | Erik Byers, Scott E. Sills | 2014-06-10 |
| 8736814 | Lithography wave-front control system and method | Yuan He, Jianming Zhou, Scott L. Light, Kaveri Jain, Zishu Zhang +1 more | 2014-05-27 |
| 8728721 | Methods of processing substrates | Scott L. Light, Kaveri Jain, Zishu Zhang, Dan B. Millward, Jianming Zhou +1 more | 2014-05-20 |
| 8703570 | Methods of fabricating substrates | Scott E. Sills, Gurtej S. Sandhu | 2014-04-22 |
| 8691477 | Reticle design for the reduction of lens heating phenomenon | Jianming Zhou, Erik Byers | 2014-04-08 |
| 8685630 | Methods of forming a pattern in a material and methods of forming openings in a material to be patterned | Michael Hyatt | 2014-04-01 |
| 8629048 | Methods of forming a pattern on a substrate | Vishal Sipani | 2014-01-14 |
| 8625078 | Illumination design for lens heating mitigation | Jianming Zhou, Scott L. Light, Dan B. Millward, Yuan He, Kaveri Jain +3 more | 2014-01-07 |
| 8609302 | Lithography methods, methods for forming patterning tools and patterning tools | Jianming Zhou, Scott L. Light, David A. Kewley, Prasanna Srinivasan | 2013-12-17 |
| 8603884 | Methods of fabricating substrates | Scott E. Sills, Gurtej S. Sandhu | 2013-12-10 |
| 8575032 | Methods of forming a pattern on a substrate | Scott L. Light | 2013-11-05 |
| 8512938 | Methods of forming a pattern in a material and methods of forming openings in a material to be patterned | Michael Hyatt | 2013-08-20 |
| 8507380 | Methods of forming contact openings and methods of increasing contact area in only one of X and Y axes in the fabrication of integrated circuitry | Mark Kiehlbauch | 2013-08-13 |
| 8507191 | Methods of forming a patterned, silicon-enriched developable antireflective material and semiconductor device structures including the same | Dan B. Millward, Yuan He, Lijing Gou, Zishu Zhang, Jianming Zhou +3 more | 2013-08-13 |
| 8492282 | Methods of forming a masking pattern for integrated circuits | — | 2013-07-23 |
| 8476002 | Methods of forming patterned masks | Zishu Zhang, Robert Carr, Farrell M. Good | 2013-07-02 |
| 8450776 | Epitaxial devices | Erik Byers, Scott E. Sills | 2013-05-28 |
| 8440371 | Imaging devices, methods of forming same, and methods of forming semiconductor device structures | Yuan He, Kaveri Jain, Lijing Gou, Zishu Zhang, Michael Hyatt +3 more | 2013-05-14 |
| 8409457 | Methods of forming a photoresist-comprising pattern on a substrate | Zishu Zhang, Hongbin Zhu, Alex J. Schrinsky | 2013-04-02 |
| 8288083 | Methods of forming patterned masks | Zishu Zhang, Robert Carr, Farrell M. Good | 2012-10-16 |
| 8273634 | Methods of fabricating substrates | Scott E. Sills, Gurtej S. Sandhu | 2012-09-25 |
| 8247302 | Methods of fabricating substrates | Scott E. Sills, Gurtej S. Sandhu | 2012-08-21 |
| 8216943 | Epitaxial growth method | Erik Byers, Scott E. Sills | 2012-07-10 |
| 8153522 | Patterning mask and method of formation of mask using step double patterning | Michael Hyatt | 2012-04-10 |