Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9235134 | Lens heating compensation in photolithography | Yuan He, Kaveri Jain, Lijing Gou, Anton J. deVilliers, Michael Hyatt +3 more | 2016-01-12 |
| 9140977 | Imaging devices, methods of forming same, and methods of forming semiconductor device structures | Yuan He, Kaveri Jain, Lijing Gou, Anton J. deVilliers, Michael Hyatt +3 more | 2015-09-22 |
| 8883372 | Reticle with composite polarizer and method of simultaneous optimization of imaging of a set of different patterns | Scott L. Light, Dan B. Millward, Anton J. deVilliers, Yuan He, Michael Hyatt +3 more | 2014-11-11 |
| 8845908 | Reticles, and methods of mitigating asymmetric lens heating in photolithography | Scott L. Light, Dan B. Millward, Yuan He, Kaveri Jain, Lijing Gou +3 more | 2014-09-30 |
| 8815497 | Semiconductor constructions and methods of forming patterns | Dan B. Millward, Kaveri Jain, Lijing Gou, Anton J. deVillers, Jianming Zhou +3 more | 2014-08-26 |
| 8736814 | Lithography wave-front control system and method | Yuan He, Jianming Zhou, Scott L. Light, Anton J. deVilliers, Kaveri Jain +1 more | 2014-05-27 |
| 8728721 | Methods of processing substrates | Scott L. Light, Kaveri Jain, Anton J. deVilliers, Dan B. Millward, Jianming Zhou +1 more | 2014-05-20 |
| 8625078 | Illumination design for lens heating mitigation | Jianming Zhou, Scott L. Light, Dan B. Millward, Yuan He, Kaveri Jain +3 more | 2014-01-07 |
| 8507191 | Methods of forming a patterned, silicon-enriched developable antireflective material and semiconductor device structures including the same | Dan B. Millward, Yuan He, Lijing Gou, Anton J. deVilliers, Jianming Zhou +3 more | 2013-08-13 |
| 8486611 | Semiconductor constructions and methods of forming patterns | Dan B. Millward, Kaveri Jain, Lijing Gou, Anton J. De Villiers, Jianming Zhou +3 more | 2013-07-16 |
| 8476002 | Methods of forming patterned masks | Anton J. deVilliers, Robert Carr, Farrell M. Good | 2013-07-02 |
| 8440371 | Imaging devices, methods of forming same, and methods of forming semiconductor device structures | Yuan He, Kaveri Jain, Lijing Gou, Anton J. deVilliers, Michael Hyatt +3 more | 2013-05-14 |
| 8409457 | Methods of forming a photoresist-comprising pattern on a substrate | Hongbin Zhu, Anton J. deVilliers, Alex J. Schrinsky | 2013-04-02 |
| 8288083 | Methods of forming patterned masks | Anton J. deVilliers, Robert Carr, Farrell M. Good | 2012-10-16 |