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Adhesion promoting photoresist underlayer composition |
Joshua Kaitz, Ke Yang, Keren Zhang, Li Cui, James F. Cameron +1 more |
2025-08-05 |
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Stamps including a self-assembled block copolymer material, and related methods |
Gurtej S. Sandhu |
2023-01-24 |
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Methods of forming a semiconductor device using block copolymer materials |
Timothy A. Quick |
2022-03-22 |
$18,741,000 |
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Methods of removing particles from over semiconductor substrates |
Joseph Neil Greeley, Wayne H. Huang |
2021-10-05 |
$16,233,000 |
| 10828924 |
Methods of forming a self-assembled block copolymer material |
Gurtej S. Sandhu |
2020-11-10 |
$16,985,000 |
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Methods of forming semiconductor device structures, and methods of forming capacitor structures |
J. Neil Greeley |
2020-04-21 |
$19,831,000 |
| 10153200 |
Methods of forming a nanostructured polymer material including block copolymer materials |
Timothy A. Quick |
2018-12-11 |
$7,538,000 |
| 10137481 |
Methods of removing particles from over semiconductor substrates |
Joseph Neil Greeley, Wayne H. Huang |
2018-11-27 |
$19,088,000 |
| 10090376 |
Methods of forming semiconductor device structures, and methods of forming capacitor structures |
J. Neil Greeley |
2018-10-02 |
$16,577,000 |
| 10005308 |
Stamps and methods of forming a pattern on a substrate |
Gurtej S. Sandhu |
2018-06-26 |
$32,156,000 |
| 9768021 |
Methods of forming semiconductor device structures including metal oxide structures |
Timothy A. Quick, J. Neil Greeley |
2017-09-19 |
$9,017,000 |
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Methods of forming semiconductor device structures |
Scott E. Sills |
2016-08-30 |
$10,335,000 |
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Methods of forming patterns with a mask formed utilizing a brush layer |
William R. Brown, Adam L. Olson, Kaveri Jain, Ho Seop Eom, Xue Gloria Chen +5 more |
2016-08-16 |
$10,478,000 |
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Thermal anneal of block copolymer films with top interface constrained to wet both blocks with equal preference |
Timothy A. Quick |
2016-04-19 |
$6,825,000 |
| 9293328 |
Semiconductor device structures comprising a polymer bonded to a base material and methods of fabrication |
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2016-03-22 |
$5,999,000 |
| 9276059 |
Semiconductor device structures including metal oxide structures |
Timothy A. Quick, J. Neil Greeley |
2016-03-01 |
$6,782,000 |
| 9257256 |
Templates including self-assembled block copolymer films |
Donald L. Westmoreland, Gurtej S. Sandhu |
2016-02-09 |
$7,210,000 |
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Lens heating compensation in photolithography |
Yuan He, Kaveri Jain, Lijing Gou, Zishu Zhang, Anton J. deVilliers +3 more |
2016-01-12 |
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Unsymmetrical ligand sources, reduced symmetry metal-containing compounds, and systems and methods including same |
Stefan Uhlenbrock, Timothy A. Quick |
2016-01-12 |
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Methods of forming semiconductor device structures, and related semiconductor device structures |
Ranjan Khurana, Gurpreet Lugani |
2016-01-05 |
$5,653,000 |
| 9184058 |
Methods of forming patterns by using a brush layer and masks |
William R. Brown, Adam L. Olson, Kaveri Jain, Ho Seop Eom, Xue Gloria Chen +5 more |
2015-11-10 |
$7,276,000 |
| 9177794 |
Methods of patterning substrates |
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2015-11-03 |
$7,896,000 |
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Imaging devices, methods of forming same, and methods of forming semiconductor device structures |
Yuan He, Kaveri Jain, Lijing Gou, Zishu Zhang, Anton J. deVilliers +3 more |
2015-09-22 |
$10,853,000 |
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Extensions of self-assembled structures to increased dimensions via a “bootstrap” self-templating method |
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2015-09-22 |
$10,853,000 |
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Methods of utilizing block copolymer to form patterns |
Scott E. Sills |
2015-08-04 |
$12,551,000 |
