Issued Patents All Time
Showing 76–100 of 120 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515814 | Method of quasi-atomic layer etching of silicon nitride | Sonam D. Sherpa | 2019-12-24 |
| 10490404 | Method of in situ hard mask removal | Christopher Talone, Andrew Nolan, Mingmei Wang | 2019-11-26 |
| 10483127 | Methods for high precision plasma etching of substrates | Mingmei Wang, Peter L. G. Ventzek | 2019-11-19 |
| 10446407 | Method of preferential silicon nitride etching using sulfur hexafluoride | Sonam D. Sherpa | 2019-10-15 |
| 10446405 | Method of anisotropic extraction of silicon nitride mandrel for fabrication of self-aligned block structures | Sonam D. Sherpa | 2019-10-15 |
| 10431470 | Method of quasi-atomic layer etching of silicon nitride | Sonam D. Sherpa | 2019-10-01 |
| 10381235 | Method of selective silicon nitride etching | Vinayak Rastogi, Sonam D. Sherpa | 2019-08-13 |
| 10373828 | Method of sidewall image transfer | Sonam D. Sherpa | 2019-08-06 |
| 10366902 | Methods for cyclic etching of a patterned layer | Vinayak Rastogi | 2019-07-30 |
| 10340137 | Monolayer film mediated precision film deposition | Peter Ventzek | 2019-07-02 |
| 10312102 | Method of quasi-atomic layer etching of silicon nitride | Sonam D. Sherpa | 2019-06-04 |
| 10304688 | Method of quasi-atomic layer etching of silicon nitride | Sonam D. Sherpa | 2019-05-28 |
| 10290506 | Method for etching high-K dielectric using pulsed bias power | Akiteru Ko | 2019-05-14 |
| 10243805 | Web-based network topology viewer | Chaitanya AGGARWAL | 2019-03-26 |
| 10237916 | Systems and methods for ESC temperature control | Sergey Voronin | 2019-03-19 |
| 10211065 | Methods for high precision plasma etching of substrates | Mingmei Wang, Peter L. G. Ventzek | 2019-02-19 |
| 10204832 | Method of patterning intersecting structures | Sergey Voronin, Christopher Talone | 2019-02-12 |
| 10192743 | Method of anisotropic extraction of silicon nitride mandrel for fabrication of self-aligned block structures | Sonam D. Sherpa | 2019-01-29 |
| 10178538 | Aerial communication framework for providing communication services to users trapped in emergency | Bighnaraj Panigrahi, Hemant Kumar Rath, Prasant Kumar MISRA, Anantha Simha | 2019-01-08 |
| 10115591 | Selective SiARC removal | Shyam Sridhar, Li Wang, Andrew Nolan, Hiroto Ohtake, Sergey Voronin | 2018-10-30 |
| 10083820 | Dual-frequency surface wave plasma source | Sergey Voronin, Jason Marion | 2018-09-25 |
| 10063062 | Method of detecting plasma discharge in a plasma processing system | Sergey Voronin | 2018-08-28 |
| 9966312 | Method for etching a silicon-containing substrate | Sergey Voronin | 2018-05-08 |
| 9947597 | Defectivity metrology during DSA patterning | Vinayak Rastogi | 2018-04-17 |
| 9881807 | Method for atomic layer etching | Sonam D. Sherpa, Mingmei Wang | 2018-01-30 |