Issued Patents All Time
Showing 51–75 of 120 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11037798 | Self-limiting cyclic etch method for carbon-based films | Barton Lane, Nasim Eibagi, Peter Ventzek | 2021-06-15 |
| 10998170 | Method for ion mass separation and ion energy control in process plasmas | Yusuke Yoshida, Sergey Voronin, David J. Coumou, Scott E. White | 2021-05-04 |
| 10998169 | Systems and methods of control for plasma processing | Peter Ventzek, Zhiying Chen | 2021-05-04 |
| 10991594 | Method for area-selective etching of silicon nitride layers for the manufacture of microelectronic workpieces | Sonam D. Sherpa | 2021-04-27 |
| 10971373 | Methods for cyclic etching of a patterned layer | Vinayak Rastogi | 2021-04-06 |
| 10937664 | Surface modification process | Cedric Thomas, Andrew Nolan | 2021-03-02 |
| 10937662 | Method of isotropic etching of silicon oxide utilizing fluorocarbon chemistry | Sonam D. Sherpa | 2021-03-02 |
| 10910196 | Mode-switching plasma systems and methods of operating thereof | Peter Ventzek, Mitsunori Ohata, Michael Hummel | 2021-02-02 |
| 10860060 | Battery protection and intelligent cooling for computing devices | Dinesh Kanayalal, Anshul Saxena | 2020-12-08 |
| 10818507 | Method of etching silicon nitride layers for the manufacture of microelectronic workpieces | Sonam D. Sherpa | 2020-10-27 |
| 10818482 | Methods for stability monitoring and improvements to plasma sources for plasma processing | Yusuke Yoshida, Jason Marion, Sergey Voronin | 2020-10-27 |
| 10818502 | System and method of plasma discharge ignition to reduce surface particles | Sergey Voronin, Jason Marion, Yusuke Yoshida, Takashi Enomoto, Yoshio Ishikawa | 2020-10-27 |
| 10811269 | Method to achieve a sidewall etch | Shyam Sridhar, Nayoung Bae, Sergey Voronin | 2020-10-20 |
| 10811273 | Methods of surface restoration for nitride etching | Christopher Talone, Erdinc Karakas, Andrew Nolan, Sergey Voronin | 2020-10-20 |
| 10777385 | Method for RF power distribution in a multi-zone electrode array | Sergey Voronin | 2020-09-15 |
| 10770305 | Method of atomic layer etching of oxide | Sonam D. Sherpa | 2020-09-08 |
| 10699911 | Method of conformal etching selective to other materials | Erdinc Karakas, Sonam D. Sherpa | 2020-06-30 |
| 10701103 | Securing devices using network traffic analysis and software-defined networking (SDN) | Chaitanya AGGARWAL, Prabhat Chandra Biswas | 2020-06-30 |
| 10658192 | Selective oxide etching method for self-aligned multiple patterning | Sonam D. Sherpa | 2020-05-19 |
| 10651017 | Method for operation instability detection in a surface wave plasma source | Sergey Voronin, Jason Marion | 2020-05-12 |
| 10607852 | Selective nitride etching method for self-aligned multiple patterning | Sonam D. Sherpa | 2020-03-31 |
| 10541146 | Method of cyclic plasma etching of organic film using sulfur-based chemistry | Vinayak Rastogi | 2020-01-21 |
| 10535531 | Method of cyclic plasma etching of organic film using carbon-based chemistry | Vinayak Rastogi | 2020-01-14 |
| 10529589 | Method of plasma etching of silicon-containing organic film using sulfur-based chemistry | Erdinc Karakas, Li Wang, Andrew Nolan, Christopher Talone, Shyam Sridhar +1 more | 2020-01-07 |
| 10529540 | Advanced methods for plasma systems operation | Sergey Voronin, Christopher Talone | 2020-01-07 |