Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8251011 | Plasma processing apparatus | Yohei Yamazawa, Manabu Iwata, Chishio Koshimizu, Fumihiko Higuchi, Asao Yamashita +5 more | 2012-08-28 |
| 8236109 | Component cleaning method and storage medium | Tsuyoshi Moriya | 2012-08-07 |
| 7897498 | Method for manufacturing semiconductor device | Glenn W. Gale, Yoshihiro Hirota, Yusuke Muraki, Genji Nakamura, Masato Kushibiki +3 more | 2011-03-01 |
| 7871532 | Plasma processing method and post-processing method | Kosuke Ogasawara, Susumu Saito | 2011-01-18 |
| 7824931 | Substrate processing control method and storage medium | Susumu Saito | 2010-11-02 |
| 7811939 | Plasma etching method | Masato Kushibiki, Chie Kato | 2010-10-12 |
| 7604908 | Fine pattern forming method | Masato Kushibiki | 2009-10-20 |
| 7527016 | Plasma processing apparatus | Yohei Yamazawa, Manabu Iwata, Chishio Koshimizu, Fumihiko Higuchi, Asao Yamashita +5 more | 2009-05-05 |
| 7514277 | Etching method and apparatus | Susumu Saito | 2009-04-07 |
| 7432172 | Plasma etching method | Hiromi Oka | 2008-10-07 |
| 7256135 | Etching method and computer storage medium storing program for controlling same | Masato Kushibiki, Masayuki Sawataishi | 2007-08-14 |
| 7242643 | Optical disk apparatus | — | 2007-07-10 |
| 7192532 | Dry etching method | Akiteru Koh, Toshihiro Miura, Takayuki Fukasawa, Masato Kushibiki, Asao Yamashita +1 more | 2007-03-20 |
| 7179752 | Dry etching method | Takashi Tsuruta, Takashi Enomoto, Hiromi Oka, Akiteru Koh | 2007-02-20 |